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Halogen Lamps for Semiconductors

半導体用ハロゲンランプ

Halogen lamps for semiconductors are special halogen lamps used in the production process of semiconductors for high-precision heating. By using a tungsten filament and enclosing halogen gas inside, the evaporated tungsten is redeposited, extending the life of the filament. It is safe and effective in reducing CO2 emissions because it heats and cools quickly, and non-contact heat using near-infrared radiant heat. It is used as a light source essential for semiconductor production processes that require precision.


Features

  • We design and manufacture a range of lamps to meet your requirements.

Specification

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Applications examples

  • Heating
  • Dry
  • Epitaxial growth apparatus

Applications/Industrial Fields

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